Angstrom Advanced PHE-104
Infrared Spectroscopic Ellipsometer
Parameters:
Wavelength:
4000-400cm-1(2.5-25um)
Beam size: 1X34mm
Automated incident angle:35° to 90°,0.01°/Step
Functions/Features:
Film’s thickness, N & K
measurement;
Resistivity measurements and
doping profiles;
Identification of chemical bonds
and buried layers investigation ;
Transmittance and
reflectance;
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